RF Power Supply for Film Formation RFS-N Series
By incorporating a high-efficiency RF amplifier, we have achieved miniaturization and weight reduction. 【ULVAC】
The RFS-N series is an RF power supply for plasma processes with output options of 13.56MHz, 0.5kW/1kW/3kW/5kW. It achieves compactness and lightweight design by incorporating a high-efficiency RF amplifier. Additionally, it features a built-in auto-matching controller function, allowing for power control and matching system control with just the main unit. 【Product Lineup】 ○RFS-1305N/1310N ○RFS-1330N/1350N ○MBX-1305N/1310N ○MBX-1330N/1350N For more details, please contact us or download the catalog.
- Company：アルバック／ULVAC, Inc.
- Price：Other
